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Research Activities and Facilities
Creative Research Laboratory
A 1,500-square-meter building named Creative Research Laboratory has been built to support the further development of three research laboratories at Suzukakedai campus as Center of Excellence in the fiscal year of 1995 by the Ministry of Education. The Precision and Intelligence Laboratory has opened three rooms in the laboratory: Mechano-Micro Processing Room, Materials Characterization Room, and Virtual Media Experiment Room. The mechano-micro processing room is wquipped with facilities for developing nano-micro mechanisms. With these rooms, following cooperative research projects are in progress:
1) Three-dimensional integration of nano-micro mechanisms
2) Formation and characterization of ferroelectric films and micro-materials
3) Virtual media environment
Mechano-micro Processing Room
Materials Characterization Room
Virtual Media Experiment Room
Interdepartmental Building (J2)
Mechano-Biotic Clean Room for bio-related researches has been built on the ground floor of the J2 building, as an extended version of the Mechano-Micro Processing Room.
Interdisciplicary development on MEMS/NEMS and biotechnology is expected by the facility.
Mechano-Biotic Clean Room
Nano- and micro-system Clean Room for photonis and electronics researches has been built on the ground floor of the J2 building. The facilities of the thin-layer depositions, lithography, nano-scale numerical-control machine, and scanning electron microscope are utilized for development of the photonics- and electronics-devices and their integration.
Nano-and micro-system Clean Room
Nanoscale fabrication processes and characterization systems are available for device fabrication.
- Ookayama Campus
- 2-12-1 Ookayama, Meguro-ku, Tokyo 152-8550
- Suzukakedai Campus
- 4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8503
- Tamachi Campus
- 3-3-6 Shibaura, Minato-ku, Tokyo 108-0023
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